Screw groove shape measurement device and tool machine using the same



【課題】ボールねじを構成するねじ軸のねじ溝形状を従来よりも高精度に測定するねじ溝形状測定装置とそれを用いた工作機械を提供する。 【解決手段】ねじ溝形状測定装置2において、変位センサ62は、ボールねじを構成するねじ軸80の表面にレーザ光を照射するかまたは探針を接触させることによって、レーザ光の照射方向の変位または探針の軸方向の変位を検出する。ねじ軸80の軸方向を第1の方向Zとし、第1の方向Zと垂直な方向を第2の方向Xとしたとき、制御部60は、レーザ光の照射方向または探針の軸方向である変位測定方向が第2の方向Xに対して傾斜した方向となるように、変位センサ62を旋回させながら又は変位センサ62の旋回角を固定した状態で、変位センサ62によってねじ軸80の各ねじ溝の形状を測定する。 【選択図】図2
PROBLEM TO BE SOLVED: To provide a screw groove shape measurement device measuring a screw groove shape of a screw shaft constituting a ball screw with higher accuracy than before, and a tool machine using the screw groove shape measurement device.SOLUTION: In a screw groove shape measurement device 2, a displacement sensor 62 detects displacement in an irradiation direction of a laser beam or displacement in an axial direction of a probe, by irradiating the surface of a screw shaft 80 constituting a screw ball with the laser beam or contacting with the probe. When the axial direction of the screw shaft 80 is defined as a first direction Z, and a direction perpendicular to the first direction Z is defined as a second direction X, a control unit 60 measures the shape of each screw groove of the screw shaft 80 with a displacement sensor 62, in a state of revolving the displacement sensor 62 or fixing a revolution angle of the displacement sensor 62, so that a displacement measurement direction to be the irradiation direction of the laser beam or the axial direction of the probe is inclined to the second direction X.SELECTED DRAWING: Figure 2




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    KR-101805730-B1December 07, 2017이연희측정대상물의 피치 서클 측정장치
    WO-2017188239-A1November 02, 2017株式会社ジェイテクトMachine tool system and surface roughness detection method